In-situ controlled growth of carbon nanotubes by local synthesis

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 831-834

  Kawano, Takeshi ^a   Cho, Chung Yeung ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC PROPERTIES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; NONMETALS; OHMIC CONTACTS; REACTIVE ION ETCHING; SILICON;

CARBON NANOTUBES (CNTS); CONTACT BEHAVIOR; CONTROLLED GROWTH; ELECTRICAL PROPERTIES; IN-SITU; INTERNATIONAL CONFERENCES; LINEAR CURRENTS; LOCAL SYNTHESIS; MICRO-ELECTRO MECHANICAL SYSTEMS; SILICON STRUCTURES; SITE-SPECIFIC;

CARBON NANOTUBES;

EID: 52349113512     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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