Recommended practice for calibrating vacuum gauges of the thermal conductivity type

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2568-2577

  Ellefson, R E ^a   Miiller, A P ^b  

^a Leybold Inficon   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PRESSURE MEASUREMENT; THERMAL CONDUCTIVITY OF GASES;

EXPLOSIVE GAS MIXTURES;

VACUUM GAGES;

EID: 0034273895     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1286024     Document Type: Article

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