Comparison of bulge test and point deflection methods for the mechanical characterisation of submicron thick composite membranes

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 379-382

  Martins, P ^a   Delobelle, P ^b   Malhaire, C ^a   Brida, S ^c   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b FEMTO ST INSTITUTE   (France)

^c AUXITROL SA   (France)

Author keywords

Bulge test; Mechanical properties; Nanoindentation; Point deflection method

Indexed keywords

ACTUATORS; MICROSYSTEMS; MOLECULAR BEAM EPITAXY; NITRIDES; NONMETALS; PLASTIC DEFORMATION; SENSORS; SILICON; SILICON NITRIDE; STRESSES; TESTING; THICK FILMS; TRANSDUCERS;

BI-LAYERS; BULGE TEST; BULGE TESTING; CHARACTERISATION; INTERNATIONAL CONFERENCES; MECHANICAL PROPERTIES; NANOINDENTATION; OXIDE MEMBRANES; POINT DEFLECTION METHOD; SOLID-STATE SENSORS; STRESS STATES; SUB MICRONS; THIN FILMS; YOUNG'S MODULUS;

COMPOSITE MEMBRANES;

EID: 50049113557     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300147     Document Type: Conference Paper

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7. ième Congrès Français de Mécanique, Troyes, Septembre 2005.