Surface micromachinable accelerometer using fringe electrical field of penetrating ferroelectric substrate and its characterization

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1219-1222

  Isono, Y ^a   Aoyagi, S ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

Accelerometer; Characterization; Ferroelectric substrate; Parylene; PZT; Sensitivity

Indexed keywords

ACCELEROMETERS; ACTUATORS; FERROELECTRICITY; MICROSYSTEMS; OPTICAL DESIGN; PIEZOELECTRIC TRANSDUCERS; SENSORS; TRANSDUCERS;

ACCELEROMETER; CHARACTERIZATION; ELECTRICAL FIELDS; FERROELECTRIC SUBSTRATE; INTERNATIONAL CONFERENCES; LARGE DIELECTRIC CONSTANT; PARYLENE; PZT; SENSITIVITY; SOLID-STATE SENSORS;

FERROELECTRIC MATERIALS;

EID: 50049109155     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300356     Document Type: Conference Paper

References (6)

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3. Analog Deivces homepage, http://www.analog.com/technology/mems/ accelerometer
4. S. Aoyagi, Y. C. Tai, "Development of Surface Micromachinable Capacitive Accelerometer Using Fringe Electrical Field", Proc. Transducers '03, pp. 1383-1386, 2003.
5. S. Aoyagi, D. Yoshikawa, K. Makihira, Y. C. Tai, "Parylene Accelerometer utilizing Spiral Beams", Proc. MEMS'06, pp. 630-633, 2006.
6. D. Yoshikawa, S. Kumagi, S. Aoyagi, "Surface Micromacinable Accelerometer Using Ferroelectric Substrate", Proc. APCOT'06, CD-ROM no. D-19, 2006.