Highly-mobile 2D micro impact actuator for space applications

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 679-682

  Mita, Makoto ^a   Takahashi, Kazuhiro ^b   Ataka, Manabu ^b   Fujita, Hiroyuki ^b   Toshiyoshi, Hiroshi ^b  

^a JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

ICP RIE; Impact actuator; Space applications; TOLASAM

Indexed keywords

ACTUATORS; MECHANISMS; MICROSYSTEMS; SENSORS; SPACE APPLICATIONS; TRANSDUCERS;

COMB DRIVES; HIGH-MOBILITY; ICP-RIE; IMPACT ACTUATOR; INTERNATIONAL CONFERENCES; PARALLEL PLATES; PULSE VOLTAGES; SOLID-STATE SENSORS; TOLASAM;

ELECTROSTATIC ACTUATORS;

EID: 50049089057     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300220     Document Type: Conference Paper

References (8)

1. T. Yoshimitsu, et al., " Micro-hopping robot for asteroid exploration.", Acta Astronautica, Volume 52, Number 2, January 2003, pp. 441-446(6)
2. M. Mita, et al., "A Micromachined Impact Microactuator Drive by Electrostatic Force" IEEE. Jour. MEMS
3. M. Mita, et al., "An Electrostatic Inertia-Driven Micro Rover" IEEE MEMS 2005
4. X. Zhao, et al., "Nonlinear Dynamics of an Electrically Driven Impact Microactuator.", Nonlinear Dynamics, Volume 40, Number 3, pp. 227-239, May 2005
5. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "A high fill-factor comb-driven XY-stage with topological layer switch architecture,"IEICE Electronics Express, vol.3, no.9, pp. 197-202, 2006.
6. K. Takahashi, et al., "SOI-CMOS PLATFORM FOR MONOLITHICALLY INTEGRATING HIGH-VOLTAGE DRIVER CIRCUITS WITH BULK-MICROMACHINED ACTUATORS.", will be presented at Transducers 07.
7. M. Mita, et al., "Multi-height HARMS by Planar Photolithography on Initial Surface," HARMST '99, 13-15 June, 1999, Chiba, Japan,
8. M. Mita, et al., "Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers", Trans. IEEJ dept E, Nov. 2000, pp. 493-497.