NiFe plated biaxial magnetostatic MEMS scanner

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1517-1520

  Yalcinkaya, Arda D ^a   Urey, Hakan ^b   Holmstrom, Sven ^b  

^a BOGAZICI UNIVERSITY   (Turkey)

^b KOÇ UNIVERSITY   (Turkey)

Author keywords

Electromagnetic actuation; Micro scanner; MOEMS

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTROMAGNETISM; ELECTROMECHANICAL DEVICES; MAGNETOSTATICS; MEMS; MICROSYSTEMS; SENSORS; TRANSDUCERS;

DRIVE CURRENTS; ELECTROMAGNETIC ACTUATION; FAST SCANNING; HIGH FREQUENCIES; IMAGING APPLICATIONS; INTERNATIONAL CONFERENCES; MAGNETIC LAYERS; MAGNETOSTATIC TORQUE; MEMS SCANNER; MICRO MIRRORS; MICRO-ELECTRO- MECHANICAL SYSTEM; MICRO-SCANNER; MIRROR SIZE; MOEMS; OPTICAL-; SCAN ANGLES; SOLID-STATE SENSORS; TWO-AXIS;

MICROELECTROMECHANICAL DEVICES;

EID: 50049089031     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300433     Document Type: Conference Paper

References (10)

1. A.D. Yalcinkaya, H. Urey, T. Montague, D. Brown, and R. Sprague "Two-axis Electromagnetic Microscanner for High Resolution Displays", J. Microelectromech. Sys., vol 15, no. 4, pp. 786-794, August, 2006.
2. H. Urey, A.D. Yalcinkaya, S.O. Isikman, O. Ergeneman, S. Holmstrom "Electromagnetic Actuators for Scanners" Proc. 20th European Conference on Solid-State Tranducers, pp. 290-291, Goteborg, Sweden, 2006.
3. C. Changho, K. Isamoto, H. Toshiyoshi, "Optically Modulated MEMS scanning endoscope" IEEE Photon. Technol. Lett., vol. 18, pp. 133-135, 2006.
4. J.-C. Tsai, M.C. Wu, "A High Port-Count Wavelength-Selective Switch Using a Large Scan-Angle, High Fill-Factor, Two-Axis MEMS Scanner Array" IEEE Photon. Technol. Lett., vol. 18, pp. 1439-1441, 2006.
5. C.-H. Ji, M.Choi, S.-C. Kim, S.H. Lee, J.-U. Bu "Performance of a Raster Scanning Laser Display System Using Diamond Shaped Frame Supported Micromirror", IEEE Photon. Technol. Lett., vol 18, no. 16, pp. 1702-1704, 2006.
6. M. Wu, H. Lin, W. Fang, "A Poly-Si-Based Vertical Comb-Drive Two-Axis Gimbaled Scanner for Optical Applications" IEEE Photon. Technol. Lett., vol 18, no. 20, pp. 2111-2113, 2006.
7. T. Saitoh, K. Nakamura, Y. Takahashi, K. Miyagi "Optical Spectrum Analyzer Utilizing MEMS Scanning Mirror" IEEE Photon. Technol. Lett., vol 18, no. 6, pp. 767-769, 2006.
8. C. Liu and Y.W. Yi "Micromachined magnetic actuators using electroplated permalloy", IEEE Trans. on Magnetics, Vol. 35, Issue 3, pp. 1976-1985, 1999.
9. H. Miyajima, N. Asaoka, M. Arima, Y. Minamoto, K. Murakami, and K. Matsumoto, "A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges", IEEE J. Microelectromech. Syst., vol. 10, pp. 418424, 2001.
10. A.D. Yalcinkaya, H. Urey, S. Holmstrom "NiFe Plated Biaxial MEMS Scanner for 2D Imaging", IEEE Photon. Technol. Lett., vol 19, no. 5, pp. 330-332, 2007.