Dielectric charging sensitivity on MEMS switches

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 363-366

  Souchon, F ^a   Charvet, P L ^a   Maeder Pachurka, C ^a   Audoin, M ^a  

^a CEA LETI   (France)

Author keywords

Dielectric charging; Electrostatic actuator; Failure analysis; MEMS; Reliability; Switch

Indexed keywords

ACTUATORS; DIELECTRIC PROPERTIES; FAILURE ANALYSIS; MICROSYSTEMS; OPTIMIZATION; PHOTORESISTS; QUALITY ASSURANCE; RELIABILITY; SENSITIVITY ANALYSIS; SENSORS; TESTING; TRANSDUCERS;

DIELECTRIC CHARGING; ELECTROSTATIC ACTUATOR; HIGHLY SENSITIVE; IN-SITU; INTERNATIONAL CONFERENCES; MEMS; MEMS SWITCHES; ROOT CAUSES; SOLID-STATE SENSORS; SURFACE CONTAMINATIONS; SWITCH; TEST PROTOCOLS;

SWITCHES;

EID: 50049083825     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300143     Document Type: Conference Paper

References (5)

1. D. Mercier et al., "A DC to 100 GHz high performance ohmic shunt switch", Microwave Symposium Digest, IEEE MTT-S International Volume 3, 6-11 June 2004 pp. 1931-1934
2. G. Rebeiz, "RF MEMS: theory, design and technology", Willey Inter Science Publisher, New Jersey, 2003, 512 pages
3. S. Melle et al., "Reliability modeling of capacitive RF MEMS", Microwave Theory and Techniques, IEEE Transactions on Volume 53, Issue 11, Nov. 2005 pp. 3482-3488
4. G. Goldsmith et al., "Lifetime characterization of capacitive RF MEMS switches", IEEE Int. Microwave Symp., Volume 1, May 20-25, 2001 pp. 227-230
5. W.M. Van Spengen et al., "The influence of the package environment on the functioning and reliability of RF-MEMS switches", Reliability Physics Symposium, Proceedings 43rd Annual 2005 IEEE International, April 17-21, 2005 pp. 337-341