Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1217-1222

  Hung, Kuo Yung ^a   Liang, Te Hsien ^a  

^a MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRONICS INDUSTRY; LIGHT; LIGHT SOURCES; LIGHTING; METALS; MIRRORS; OPTICAL DESIGN; PHOTORESISTS; POLYMERS; PRISMS; SURFACE ROUGHNESS; TECHNOLOGY; THICK FILM DEVICES; THICK FILMS;

3-D STRUCTURES; DOVE PRISM; DVD PICK-UP; FABRICATION TECHNOLOGIES; HIGH ASPECT RATIOS; HIGHLY INTEGRATED; MICRO STRUCTURING; MICRO-OPTICAL SYSTEMS; MICRO-PIV; NOVEL METHODS; OPTIC DEVICES; OPTICAL PATHS; OPTICAL-; PENETRATION RATES; POLYMERIC MATERIAL; QUALITY CRITERION; RED LIGHT; REFLECTING MIRRORS; REFLECTING SURFACES; SHORT WAVELENGTHS; STRUCTURAL CHANGES;

OPTICAL SYSTEMS;

EID: 49949116288     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0545-4     Document Type: Conference Paper

References (13)

1. 2LIGA) process for control of side wall inclination. Journal of the IEEE, pp 252-256
2. Gardeniers JGE, Berenschot JW, de Boer MJ et al (2002) Silicon micromachined hollow microneedles for transdermal liquid transfer. Proc. IEEE Int. Conf. on MEMS'02, Las Vegas, USA, Jan. 20-24, pp 141-144
3. Armand A, Stroock AD, Stephan DK, George M (2002) Patterning flows using grooved surfaces: application to microfluidics. Proc. of the μTAS'02 Symposium, Nara, Japan, Nov. 3-7, pp 620-622
4. Freeman MO, Shin HF, Chang HR, Wang JK, Chen CL, Chuang RN, Chang MW (1998) High efficiency HOEs for holographic DVD pickup heads. IEEE Trans Magn 34(2):456-458
5. Beuret C, Racine GA, Gobet J, Luthier R, Rooij NF (1994) Microfabrication of 3D multidirectional inclined structures by uv lithography and electroplating. Proc. of the MEMS'94, pp 81-85
6. Sato H, Kakinuma T, Go J.S., Shoji S (2003) A novel fabrication of in-channel 3D micromesh structure using maskless multi-angle exposure and its microfilter application. Proc. of the MEMS'03, Kyoto, Japan, Jan. 19-23, pp 223-226
7. Han M, Lee W, Lee SK, Lee SS (2002) Microfabrication of 3D oblique structures by inclined UV lithography. Proc. of the μTAS'02 Symposium, Nara, Japan, Nov. 3-7, pp 106-108
8. Yoon YK, Park JH, Cros F, Allen M.G. (2003) Integrated vertical screen microfilter system using inclined SU-8 structures. Proc. of the MEMS'03, Kyoto, Japan, January 19-23, pp 227-230
9. Schallenberg T et al (2002) In situ structuring during MBE regrowth with shadow masks. Physical E 13:1212-1215
10. Schult K et al (1999) Disposable optical sensor chip, for medical diagnostics: new ways in bioanalysis. Anal Chem 71:5430-5435
11. Chrouis N, Lee LP Total Internal Reflection-Based Biochip For High Throughput Bioassays. 7th lnternational Conference on Miniaturized Chemical and Blochemlcal Analysts Systems 2003, October 5-9, Squaw Valley, California, USA, pp 1323-1326
12. Hung KY, Hu HT, Tseng FG (2004) Application 3D glycerol-compensated inclined-exposure technology to integrated optical pick-up head. J Micromech Microeng 14:975-983
13. Sinzinger S et al (2003) Microoptics, McGWILEY-VCH GmbH & Co. KGaA