In situ structuring during MBE regrowth with shadow masks

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 13, Issue 2-4, 2002, Pages 1212-1215

  Schallenberg, T ^a   Schumacher, C ^a   Faschinger, W ^a  

^a UNIVERSITY OF WÜRZBURG   (Germany)

Author keywords

In situ; Nanostructures; Selective area epitaxy; Shadow mask

Indexed keywords

MASKS; MOLECULAR BEAMS; MOLECULAR ORIENTATION; NANOSTRUCTURED MATERIALS; SELF ASSEMBLY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES;

SHADOW MASKS;

MOLECULAR BEAM EPITAXY;

EID: 0036492751     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00338-7     Document Type: Conference Paper

References (3)