Decorated vacancy clusters in Si and thin C films grown on Si studied by depth profiling positron annihilation spectroscopies

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 4, Issue 10, 2007, Pages 3614-3619

  Brusa, R S ^a  

^a UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

C FILMS; DEPOSITED THIN FILMS; INTERNATIONAL CONFERENCES; OPEN-VOLUME DEFECTS; SILICON SUBSTRATES; TECHNOLOGICAL DEVELOPMENTS; VACANCY CLUSTERING; VACANCY-LIKE DEFECTS;

CARBON CLUSTERS; CHLORINE COMPOUNDS; DEPTH PROFILING; ELECTRONS; HELIUM; LITHOGRAPHY; MAGNESIUM PRINTING PLATES; MOLECULAR BEAM EPITAXY; NONMETALS; POSITRON ANNIHILATION; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; RADIATION DAMAGE; SILICON; SUPERCONDUCTING MATERIALS; TECHNOLOGICAL FORECASTING; THERMAL SPRAYING; THICK FILMS; VACANCIES;

CARBON FILMS;

EID: 49949115577     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200675748     Document Type: Conference Paper

References (20)

1. P. Ashoka-Kumar, K. G. Lynn, and O. Welch, J. Appl. Phys. 76, 4935 (1994).
2. R. Krause-Rehberg and H. S. Leipner, Positron Annihilation in Semiconductors, Defect Studies, Springer Series in Solid State Science (Springer-Verlag, Berlin/Heidelberg, 1999).
3. M. Alatalo, H. Kauppinen, K. Saarinen, M. J. Puska, J. Mäkinen, P. Hautojärvi, and R. M. Nieminen, Phys. Rev. B 51, 4176 (1995).
4. P. Asoka-Kumar, M. Alatalo, V. J. Ghosh, A. C. Kruseman, B. Nielsen, and K. G. Lynn, Phys. Rev. Lett. 77, 2097 (1996).
5. K. G. Lynn and A. N. Goland, Solid State Commun. 18, 1549 (1976).
6. I. Makkonen, H. Hakala, and M. J. Puska, Phys. Rev. B 73, 035103 (2006).
7. R. S. Brusa, M. Duarte Naia, A. Zecca, C. Nobili, G. Ottaviani, R. Tonini, and A. Dupasquier, Phys. Rev. B 49, 7271 (1994).
8. R. S. Brusa, G. P. Karwasz, N. Tiengo, A. Zecca, F. Corni, G. Calzolari, and C. Nobili, J. Appl. Phys. 85, 2390 (1999).
9. R. S. Brusa, G. P. Karwasz, N. Tiengo, A. Zecca, F. Corni, R. Tonini, and G. Ottaviani, Phys Rev. B 61, 10154 (2000).
10. R. S. Brusa,.C. Macchi, S. Mariazzi, G. P. Karwasz, W. Egger, P. Sperr, and G. Kögel, Phys. Rev. B 71, 245320 (2005).
11. R. S. Brusa,.C. Macchi, S. Mariazzi, G. P. Karwasz, W. Egger, P. Sperr, and G. Kögel, Appl. Phys. Lett. 88, 011920 (2006).
12. C. Macchi, S. Mariazzi, G. P. Karwasz, R. S. Brusa, P. Folegati, S. Fabbroni, and G. Ottaviani, Phys. Rev. B, submitted.
13. R. S. Brusa, C. Macchi, S. Mariazzi, G. P. Karwasz, N. Laidani, R. Bartali, and M. Anderle, Appl. Phys. Lett. 86, 221906 (2005).
14. A. Zecca, M. Bettonte, J. Paridaens, G. P. Karwasz, and R. S. Brusa, Meas. Sci. Technol. 9, 1 (1998).
15. W. Bauer-Kugelmann, P. Sperr, G. Kögel, and W. Triftshäuser, Mater. Sci. Forum 363-365, 529 (2001).
16. A. van Veen, H. Schut, J. de Vries, R. A. Hakvoort, and M. R. Ijpma, in: AIP Conf. Proc. 218, Positron Beams for Solids and Surfaces, London Ontario 1990, edited by Peter J. Schultz, Guiti R. Massoumi, and Peter J. Simpson, p. 171.
17. A. Dupasquier and G. Ottaviani, in: Positron Spectroscopy of Solids, edited by A. Dupasquier and A. P. Mills, Jr. (IOS Press, Amsterdam, 1995), p. 581.
18. G. Kögel, Appl. Phys. A 63, 227 (1996).
19. Computer Program PATFIT, RISO National Laboratory, Denmark, 1998.
20. M. Hakala, M. J. Puska, and R. M. Nieminen, Phys. Rev. B 57, 7621 (1998).