Commercialization of MEMS and nano manufacturing

6th International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics, Polytronic 2007, Proceedings

Volumn , Issue , 2007, Pages 20-23

  Maeda, Ryutaro ^a   Takahashi, Masaharu ^a   Sasaki, Shinya ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Desk top nano factory; Education of high technology; Foundry; MEMS commercialization; Nanoimprinting

Indexed keywords

ADHESIVES; COMPOSITE MICROMECHANICS; COST EFFECTIVENESS; COST REDUCTION; ELECTROMECHANICAL DEVICES; ELECTRONICS INDUSTRY; FOUNDRIES; FOUNDRY PRACTICE; KETONES; MANGANESE COMPOUNDS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; OPTICAL DESIGN; PHOTONICS; POLYMERS; PRIVATIZATION; TECHNOLOGY;

AUTOMOBILE SENSORS; BATCH PRODUCTION; BUSINESS SUCCESS; DESK TOP NANO FACTORY; EB WRITING; EDUCATION OF HIGH TECHNOLOGY; FOUNDRY; HIGH-TECHNOLOGY; INK JETTING; MASS-PRODUCTION; MEMS APPLICATIONS; MEMS COMMERCIALIZATION; MEMS INDUSTRY; MICRO-ELECTRO MECHANICAL SYSTEMS; NANO IMPRINTS; NANO MANUFACTURING; NANO TECHNOLOGIES; NANOIMPRINTING; NEW IDEAS; NEW MATERIALS; PRIVATE COMPANIES; SMALL BATCH PRODUCTION;

PHOTORESISTS;

EID: 49949112925     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/POLYTR.2007.4339130     Document Type: Conference Paper

References (3)

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2. Tsaur J.J. et al. "Wideband and high reliability RF-MEMS switches using PZT/HfO2 multi-layered high k dielectrics", IEEE international reliability physics symposium 2004, Phoenix Arizona, USA, pp. 259, 2004
3. Takahashi M., Murakoshi Y., Sugimoto K. and Maeda R., "Micro/Nano hot embossing pyrex glass with glassy carbon mold fabricated by focused-ion beam etching", Symposium on DTI P 2004, pp. 441, 2004