Shape controllable micro-nozzle fabrication

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1641-1646

  Kang, Kyungnam ^a   Jin, Yoonyoung ^a   Goettert, Jost ^a   Ajmera, Pratul K ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZERS; OPTICAL DESIGN;

BACK-SIDE EXPOSURE; BASE DIAMETER; FABRICATION METHODS; FABRICATION TECHNIQUES; FRAUNHOFER DIFFRACTION; MICRO NOZZLES; SHAPE AND SIZE; SHAPE CONTROLLABLE; SIMULATION RESULTS;

NOZZLES;

EID: 49949092168     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0604-5     Document Type: Conference Paper

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