Diode temperature sensor with the output voltage proportional to the absolute temperature and its application to the thin film Pirani vacuum sensor

IECON Proceedings (Industrial Electronics Conference)

Volumn , Issue , 2007, Pages 2197-2202

  Takashima, Noriaki ^a   Kimura, Mitsuteru ^a  

^a TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNUAL CONFERENCE; DC CURRENTS; OUTPUT SIGNALS; OUTPUT VOLTAGES;

INDUSTRIAL ELECTRONICS; ONTOLOGY; SENSORS; TEMPERATURE SENSORS; THICK FILMS;

ELECTRONICS INDUSTRY;

EID: 49949091000     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECON.2007.4460257     Document Type: Conference Paper

References (5)

1. G..C.M. Meijer and A.W. Herwaarden (Editors) : "Thermal Sensors", Institute of Physics Publishing, pp. 116-120 ,1994.
2. Mitsuteru Kimura and Katsuhisa Toshima:"Thermistor-like pn junction temperature-Sensor with variable sensitivity and its combination with a micro-air-bridge heater", Sensors and Actuators, A108, pp.239-243, 2003.
3. S.M.Sze (Editor): "Semiconductor Sensors", John Wiley& Sons, Inc., , pp.370-372, 1994.
4. Noriaki Takashima, Mitsuteru Kimura, "Pn junction Temperature-Sensor by use of superimposed AC signal", IEEJ Trans. SM, Vol.127, No.3, pp.140-143, 2007.
5. Hiroshi Yonekura, Mitsuteru Kimura, "Ambient temperature compensation of thin film pirani vacuum sensor", IEEJ Trans. SM, Vol.127, No.3, pp.136-139, 2007.