Ambient temperature compensation of thin film Pirani vacuum sensor

IEEJ Transactions on Sensors and Micromachines

Volumn 127, Issue 3, 2007, Pages

  Yonekura, Hiroshi ^a   Kimura, Mitsuteru ^a  

^a TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

MEMS; Micro heater; Pirani gauge; Pressure sensor; Thermistor; Vacuum sensor

Indexed keywords

GAGES; MICROMACHINING; THERMAL EFFECTS; THERMISTORS; VACUUM APPLICATIONS;

MICRO-AIR-BRIDGE (MAB); PULSE HEATING; VACUUM SENSING;

THIN FILM DEVICES;

EID: 33847755042     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.127.136     Document Type: Conference Paper

References (4)

1. M. Kimura and K. Toshima: "Thermistor-like pn junction temperature-sensor with variable sensitivity and its combination with a micro-air-bridge heater", Sens. Actors A, Vol. 108, pp 239-243 (2003)
2. th THERMINIC Workshop, pp.325-329 (2003)
3. F. Sakurai, H. Miyakawa, H. Oota, T. Terada, and M. Kimura: "Application of the pn diode temperature sensor to the MEMS type vacuum sensor", Proc of Thechnical Meeting on Physical Sensor, IEE Japan, PHS-05-2, pp7-10 (2005)
4. H. Yonekura and M. Kimura: "Study on Thin Film Pirani vacuum Sensor with Diode-Themistors", Pros.of Thechnical Meeting on Physical Sensor, IEE Japan, PHS-06-14, pp.71-74 (2006)