Interaction of germanium with silicon dioxide

Surface Science

Volumn 602, Issue 16, 2008, Pages 2796-2800

  Winkenwerder, Wyatt A ^a   Ekerdt, John G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Etching; Germane; Germanium; Nanocrystals; Silicon dioxide; Surface reactions; Thermal desorption

Indexed keywords

FLOW INTERACTIONS; NONMETALS; SILICA; SILICON COMPOUNDS;

ETCHING; GERMANE; NANOCRYSTALS; SILICON DIOXIDE; SILICON DIOXIDES; SURFACE REACTIONS; THERMAL DESORPTION;

GERMANIUM;

EID: 49849092238     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.07.010     Document Type: Article

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