Automatic generation of simulation models for semiconductor manufacturing

Proceedings - Winter Simulation Conference

Volumn , Issue , 2007, Pages 648-657

  Mueller, Ralph ^a   Alexopoulos, Christos ^a   McGinnis, Leon F ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STRUCTURES; ELECTRIC CONDUCTIVITY; FILE ORGANIZATION; GRAPH THEORY; MARINE BIOLOGY; PETRI NETS; SEMICONDUCTOR MATERIALS;

AUTOMATIC GENERATION; DOMAIN-SPECIFIC; EXTENDED PETRI NETS; LARGE-SCALE SIMULATIONS; LIVENESS; MODEL VERIFICATION; OBJECT-ORIENTED; PROBLEM DEFINITION; SEMATECH DATA; SEMICONDUCTOR MANUFACTURING; SIMULATION MODELLING; SUB-NETS;

INDUSTRIAL APPLICATIONS;

EID: 49749149162     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2007.4419658     Document Type: Conference Paper

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