Reusable tool for 300mm intrabay AMHS modeling and simulation

Proceedings - Winter Simulation Conference

Volumn , Issue , 2007, Pages 1789-1797

  El Nashar, Ahmed ^a   El Kilany, Khaled S ^b  

^a University of Central Florida   (United States)

^b Arab Academy for Science and Technology and Maritime Transport   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

MATERIALS HANDLING EQUIPMENT; OPTICAL DESIGN; TECHNOLOGY;

300 MM WAFERS; AUTOMATED MATERIAL HANDLING SYSTEMS; MODELING AND SIMULATION; NEW TECHNOLOGIES; PERFORMANCE METRICS; PROCESSING TOOLS; PRODUCTION TOOLS; WAFER FABRICATIONS;

MATERIALS HANDLING;

EID: 49749107168     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2007.4419804     Document Type: Conference Paper

References (10)

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10. Spiegel, M., J. Paul F. Reynolds, et al. (2005). A Case Study of Model Context for Simulation Composability and Reusability. Proceedings of the 2005 Winter Simulation Conference.