|
Volumn , Issue , 2007, Pages 1708-1712
|
Improved simple simulation models for semiconductor wafer factories
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ELECTRIC CONDUCTIVITY;
ELECTRONICS INDUSTRY;
MICROELECTRONICS;
OPTICAL DESIGN;
SEMICONDUCTOR MATERIALS;
AUTOMATED TRANSPORT;
COMPLEX ENVIRONMENTS;
COMPLEX PRODUCTION;
CYCLE TIME;
CYCLE-TIME DISTRIBUTION;
MATERIAL FLOW CONTROL;
PRODUCT-VARIETY;
SEMI-CONDUCTOR WAFER;
SEMICONDUCTOR WAFER FABRICATION;
SIMPLE MODELING;
SIMULATION MODELLING;
SYSTEM COMPLEXITY;
WAFER-FABS;
CHLORINE COMPOUNDS;
|
EID: 49749083070
PISSN: 08917736
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/WSC.2007.4419793 Document Type: Conference Paper |
Times cited : (27)
|
References (5)
|