|
|
|
Volumn 2, Issue , 2000, Pages 1481-1490
|
|
Why do simple wafer fab models fail in certain scenarios?
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
COMPUTER SIMULATION;
CORRELATION METHODS;
PRODUCTION CONTROL;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON WAFERS;
WAFER FABRICATION;
WSI CIRCUITS;
|
|
EID: 0034427945
PISSN: 02750708
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (35)
|
|
References (11)
|
