In-situ doping during ZnO atomic layer deposition

Journal of the Korean Physical Society

Volumn 53, Issue 1, 2008, Pages 253-257

  Lim, S J ^a   Lee, Sung Kyun ^a   Jo, Minho ^a   Lee, Chang Soo ^a   Kwon, Soonju ^a   Kim, Hyungjun ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Al doped ZnO films; Atomic layer deposition; Transparent conducting oxides

Indexed keywords

EID: 49649114659     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.53.253     Document Type: Conference Paper

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