-
1
-
-
0033078988
-
Strategy and metrics for wafer handling automation in legacy semiconductor fab
-
Guldi R.L., Whitfield M.T., and Poag F.D. Strategy and metrics for wafer handling automation in legacy semiconductor fab. IEEE Transactions on Semiconductor 12 1 (1999) 102-108
-
(1999)
IEEE Transactions on Semiconductor
, vol.12
, Issue.1
, pp. 102-108
-
-
Guldi, R.L.1
Whitfield, M.T.2
Poag, F.D.3
-
2
-
-
36148939412
-
An end effector based on the Bernoulli principle for handling sliced fruit and vegetables
-
Davis S., Gray J.O., and Caldwell D.G. An end effector based on the Bernoulli principle for handling sliced fruit and vegetables. Robotics and Computer-Integrated Manufacturing 24 2 (2008) 249-257
-
(2008)
Robotics and Computer-Integrated Manufacturing
, vol.24
, Issue.2
, pp. 249-257
-
-
Davis, S.1
Gray, J.O.2
Caldwell, D.G.3
-
3
-
-
25144477966
-
Non-contact handling in microassembly: acoustical levitation
-
Vandaele V., Lambert P., and Delchambre A. Non-contact handling in microassembly: acoustical levitation. Precision Engineering 29 4 (2005) 491-505
-
(2005)
Precision Engineering
, vol.29
, Issue.4
, pp. 491-505
-
-
Vandaele, V.1
Lambert, P.2
Delchambre, A.3
-
4
-
-
0001504356
-
Levitation in physics
-
Brandt E.H. Levitation in physics. Science 243 (1989)
-
(1989)
Science
, vol.243
-
-
Brandt, E.H.1
-
5
-
-
0030213140
-
Contactless magnetically levitated silicon wafer transport system
-
Park K.H., Lee S.K., Yi J.H., Kim S.H., Kwark Y.K., and Wang I.A. Contactless magnetically levitated silicon wafer transport system. Mechatronics 6 5 (1996) 591-610
-
(1996)
Mechatronics
, vol.6
, Issue.5
, pp. 591-610
-
-
Park, K.H.1
Lee, S.K.2
Yi, J.H.3
Kim, S.H.4
Kwark, Y.K.5
Wang, I.A.6
-
6
-
-
0033901380
-
Non-contact transportation using near-field acoustic levitation
-
Ueha S., Hashimoto Y., and Koike Y. Non-contact transportation using near-field acoustic levitation. Ultrasonics 38 (2000) 26-32
-
(2000)
Ultrasonics
, vol.38
, pp. 26-32
-
-
Ueha, S.1
Hashimoto, Y.2
Koike, Y.3
-
8
-
-
34250839553
-
Modeling the gas and particle flow inside cyclone separators
-
Cortes C., and Gil A. Modeling the gas and particle flow inside cyclone separators. Progress in Energy and Combustion Science 33 (2007) 409-452
-
(2007)
Progress in Energy and Combustion Science
, vol.33
, pp. 409-452
-
-
Cortes, C.1
Gil, A.2
-
9
-
-
49649088075
-
Velocity distribution of swirl flow in a circular cylinder
-
JPN
-
Nishimura K., Takama N., Endoh T., and Yoshiki H. Velocity distribution of swirl flow in a circular cylinder. Manufacture Research 42 11 (1990) 653-656 JPN
-
(1990)
Manufacture Research
, vol.42
, Issue.11
, pp. 653-656
-
-
Nishimura, K.1
Takama, N.2
Endoh, T.3
Yoshiki, H.4
-
10
-
-
0027676069
-
Flow visualization studies of a swirling flow in a cylinder
-
Kumar R., and Conover T. Flow visualization studies of a swirling flow in a cylinder. Experimental, Thermal and Fluid Science 7 3 (1993) 254-262
-
(1993)
Experimental, Thermal and Fluid Science
, vol.7
, Issue.3
, pp. 254-262
-
-
Kumar, R.1
Conover, T.2
-
11
-
-
49649087075
-
Entrance loss for turbulent flow without swirl between parallel discs
-
Kawaguchi T. Entrance loss for turbulent flow without swirl between parallel discs. Transactions of the Japan Society of Mechanical Engineers 36 288 (1970) 1341-1348
-
(1970)
Transactions of the Japan Society of Mechanical Engineers
, vol.36
, Issue.288
, pp. 1341-1348
-
-
Kawaguchi, T.1
-
12
-
-
49649111547
-
-
Determination of flow-rate characteristics of components using compressible fluids - Part 3, ISO/CD 6358-3, 2005.
-
Determination of flow-rate characteristics of components using compressible fluids - Part 3, ISO/CD 6358-3, 2005.
-
-
-
|