Contactless magnetically levitated silicon wafer transport system

Mechatronics

Volumn 6, Issue 5, 1996, Pages 591-610

  Park, K H ^a   Lee, S K ^a   Yi, J H ^b   Kim, S H ^b   Kwak, Y K ^b   Wang, I A ^c  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Plasma and Materials Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; DYNAMICS; ELECTRIC COILS; ELECTRIC CURRENTS; FEEDBACK CONTROL; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; PROPELLERS; ROBOTICS; SILICON WAFERS; SYSTEM STABILITY;

DYNAMIC MODEL; LEVITATION; PROPELLING FORCE; PROPELLING SYSTEM; PROPULSION COILS; SEMICONDUCTOR FABRICATION; SILICON WAFER TRANSPORT SYSTEM; STABILIZATION TRACKS;

ROBOTS;

EID: 0030213140     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/0957-4158(95)00083-6     Document Type: Article

References (13)

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