Strategy and metrics for wafer handling automation in legacy semiconductor fab

IEEE Transactions on Semiconductor Manufacturing

Volumn 12, Issue 1, 1999, Pages 102-108

  Guldi, Richard L ^a   Paradis, Douglas E ^a   Whitfield, Martin T ^a   Poag, Frank D ^a   Jensen, David P ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; INTEGRATED CIRCUIT MANUFACTURE; MATERIALS HANDLING; OPTIMIZATION; PROCESS ENGINEERING; PRODUCTION ENGINEERING; QUALITY ASSURANCE;

DIE YIELD LOSS; SCRATCH REDUCTION PROCESS; WAFER HANDLING AUTOMATIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033078988     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.744531     Document Type: Article

References (0)