High-frequency ferromagnetic inductors covered by as-deposited FeCoAlO films with stress-induced uniaxial anisotropy

Thin Solid Films

Volumn 516, Issue 21, 2008, Pages 7748-7752

  Li, Shandong ^a,b,c   Duh, Jenq Gong ^b   Liao, Chen Neng ^b  

^a FUJIAN NORMAL UNIVERSITY   (China)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c NANJING UNIVERSITY   (China)

Author keywords

Ferromagnetic inductor; Gradient sputtering; High frequency permeability; Uniaxial anisotropy

Indexed keywords

ANISOTROPY; CRYSTALLOGRAPHY; GRADIENT METHODS; MAGNETIC PROPERTIES; MOLECULAR BEAM EPITAXY;

AS-DEPOSITED; COMPOSITION GRADIENTS; FERROMAGNETIC INDUCTOR; GRADIENT SPUTTERING; HIGH ANISOTROPY; HIGH FREQUENCIES; HIGH-FREQUENCY PERMEABILITY; NANO-CRYSTALLINE; ROOM TEMPERATURES; STRESS-INDUCED; UNIAXIAL ANISOTROPY; UNIAXIAL MAGNETIC ANISOTROPY;

MAGNETIC ANISOTROPY;

EID: 49349084966     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.05.034     Document Type: Article

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