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Volumn 15, Issue 7, 2008, Pages
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Radial characterization of the electron energy distribution in a helicon source terminated by a double layer
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTENNA ACCESSORIES;
DISSOCIATION;
ELECTRON ENERGY LEVELS;
HELICONS;
ION BEAMS;
PLASMA DIAGNOSTICS;
PLASMA SOURCES;
RISK ASSESSMENT;
WALLS (STRUCTURAL PARTITIONS);
CURRENT-FREE DOUBLE LAYER;
DOUBLE LAYER;
ELECTRON ENERGIES;
ELECTRON ENERGY DISTRIBUTION;
HELICON PLASMAS;
HELICON SOURCES;
HELMHOLTZ COILS;
LOW PRESSURE;
POTENTIAL DROP;
PROBABILITY FUNCTIONS;
RADIO-FREQUENCY POWER;
RF ANTENNA;
SHEATH POTENTIAL;
PROBABILITY DISTRIBUTIONS;
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EID: 49149130044
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2959137 Document Type: Article |
Times cited : (40)
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References (25)
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