Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser

Vacuum

Volumn 82, Issue 12, 2008, Pages 1449-1451

  Yap, Seong Shan ^a   Tou, Teck Yong ^a  

^a MULTIMEDIA UNIVERSITY   (Malaysia)

Author keywords

Diamond like carbon; Heterojunction; Pulsed laser deposition; Raman

Indexed keywords

CARBON; CARBON FILMS; DIAMOND FILMS; DIAMONDS; GRAPHITE; LASERS; NEODYMIUM; NONMETALS; PULSED LASER APPLICATIONS; SILICON;

BACKGROUND PRESSURE; DIAMOND-LIKE; DIAMOND-LIKE CARBON; HETEROJUNCTION; P-TYPE SILICON; PULSED LASER DEPOSITION; PULSED ND:YAG LASER; PYROLY TIC GRAPHITE; RAMAN;

DIAMOND LIKE CARBON FILMS;

EID: 49149125197     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.012     Document Type: Article

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