Simultaneous extraction of recoverable and permanent components contributing to bias-temperature instability

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 801-804

  Grasser, T ^a   Kaczer, B ^b   Hehenberger, P ^a   Gos W ^a   O'Connor, R ^b   Reisinger, H ^c   Gustin, W ^c   Schlunder C ^c  

^a INSTITUTE FOR MICROELECTRONICS   (Austria)

^b IMEC   (Belgium)

^c INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MOSFET DEVICES; SULFATE MINERALS;

BIAS TEMPERATURE STRESS; BIAS-TEMPERATURE INSTABILITY; MEASUREMENT TECHNIQUES; PERMANENT COMPONENTS; SIMULTANEOUS EXTRACTION;

ELECTRON DEVICES;

EID: 49149106529     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4419069     Document Type: Conference Paper

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