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Volumn , Issue , 2007, Pages 289-292
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Characterizing the operating curve - How can semiconductor fabs grade themselves?
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Author keywords
[No Author keywords available]
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Indexed keywords
BIOLOGICAL MATERIALS;
ELECTRIC CONDUCTIVITY;
THROUGHPUT;
CONTINUOUS IMPROVEMENTS;
INTERNATIONAL SYMPOSIUM;
QUEUING ANALYSIS;
SEMICONDUCTOR FABS;
SEMICONDUCTOR MANUFACTURING;
SEMICONDUCTOR MATERIALS;
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EID: 49149083932
PISSN: 1523553X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ISSM.2007.4446827 Document Type: Conference Paper |
Times cited : (16)
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References (8)
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