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Volumn 8, Issue 6, 2008, Pages 675-678
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Micro via and line patterning for PCB using imprint technique
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Author keywords
Dielectric resins; Imprint; PCB; Via holes
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Indexed keywords
ELECTRONIC EQUIPMENT MANUFACTURE;
EPOXY RESINS;
NANOIMPRINT LITHOGRAPHY;
PAINTING;
PRINTED CIRCUIT MANUFACTURE;
PRINTED CIRCUITS;
RESINS;
SILICA;
SILICATE MINERALS;
SILICON COMPOUNDS;
TELECOMMUNICATION;
TELECOMMUNICATION EQUIPMENT;
ELECTRONIC COMPONENTS;
ELECTRONIC DEVICES;
LINE PATTERNING;
LITHOGRAPHY PROCESSES;
MICRO SIZE;
VIA HOLES;
PRINTED CIRCUIT BOARDS;
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EID: 48949118096
PISSN: 15671739
EISSN: None
Source Type: Journal
DOI: 10.1016/j.cap.2007.04.048 Document Type: Article |
Times cited : (12)
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References (6)
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