SAW devices based on ZnO inclined c-axis on diamond

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1420-1423

  Bensmaine, S ^a,b   Le Brizoual, L ^a   Elmazria, O ^a,c   Fundenberger, J J ^c   Belmahi, M ^a   Benyoucef, B ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITY OF TLEMCEN   (Algeria)

^c UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Device modeling; Diamond film; Surface acoustic wave device

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; DIAMOND FILMS; ELECTROMECHANICAL COUPLING; II-VI SEMICONDUCTORS; OXIDE FILMS; X RAY DIFFRACTION;

DEVICE MODELING; DIAMOND SUBSTRATES; ELECTROMECHANICAL COUPLING COEFFICIENTS; R.F. MAGNETRON SPUTTERING; SAW DEVICE; SELF STANDINGS; ZINC OXIDE (ZNO);

ZINC OXIDE;

EID: 48949097252     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.02.022     Document Type: Article

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