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Volumn 37, Issue 2-4, 2008, Pages 50-56

Developments in micro and nano engineering and manufacturing

Author keywords

FIB; Micro machining; Nano imprinting; Picrosecond laser ablation

Indexed keywords

ABLATION; BUILDING MATERIALS; FACILITIES; GLASS CERAMICS; HEALTH; INDUSTRIAL ENGINEERING; ION BOMBARDMENT; LASER ABLATION; LITHOGRAPHY; MACHINING; METALS; NONMETALS; POLYMERS; PROCESS ENGINEERING; PRODUCTION ENGINEERING; PULSED LASER DEPOSITION; SILICON; TECHNOLOGY; TEXTILE INDUSTRY;

EID: 48849108733     PISSN: 14658011     EISSN: None     Source Type: Journal    
DOI: 10.1179/174328908X283302     Document Type: Conference Paper
Times cited : (9)

References (10)
  • 1
    • 48849090800 scopus 로고    scopus 로고
    • Carl Zeiss SMT Ltd, Cambridge, CB1, UK
    • Carl Zeiss SMT Ltd, 511 Coldhams Lane, Cambridge, CB1 3JS, UK.
    • 511 Coldhams Lane
  • 5
    • 48849095742 scopus 로고    scopus 로고
    • M. R. H. Knowles, G. Rutterford, D. Karnakis and A. Ferguson: Proc. 4M 1st Int. Conf. on 'Multi-material micro manufacture', Karlsruhe, Germany, June-July 2005. FP6 4MNetwork of Excellence, Manufactuning Engineering Centre, Cardiff University, 223.
    • M. R. H. Knowles, G. Rutterford, D. Karnakis and A. Ferguson: Proc. 4M 1st Int. Conf. on 'Multi-material micro manufacture', Karlsruhe, Germany, June-July 2005. FP6 4MNetwork of Excellence, Manufactuning Engineering Centre, Cardiff University, 223.
  • 6
    • 48849100838 scopus 로고    scopus 로고
    • M. R. H. Knowles, G. Rutterford, D. Karnakis, T. Dobrev, P. Petkov and S. Dimov: Proc. 4M 2006 1st Int. Conf. on 'Multimaterial micro manufacture', Grenoble, France, September 2006. FP6 4M Network of Excellence, Manufactuning Engineering Centre, Cardiff University, 131.
    • M. R. H. Knowles, G. Rutterford, D. Karnakis, T. Dobrev, P. Petkov and S. Dimov: Proc. 4M 2006 1st Int. Conf. on 'Multimaterial micro manufacture', Grenoble, France, September 2006. FP6 4M Network of Excellence, Manufactuning Engineering Centre, Cardiff University, 131.
  • 7
    • 48849099722 scopus 로고    scopus 로고
    • Oxford Lasers Ltd, Unit 8, Didcot, Oxfordshire, OX11, UK
    • Oxford Lasers Ltd, Unit 8, Moorbrook Park, Didcot, Oxfordshire, OX11 7HP, UK.
    • Moorbrook Park
  • 8
    • 48849113044 scopus 로고
    • Molecular Imprints Inc, Austin, TX, USA
    • Molecular Imprints Inc., 1807-C West Braker Lane, Austin, TX 78758-3605 USA.
    • (1807) C West Braker Lane , pp. 78758-83605
  • 9
    • 48849111237 scopus 로고    scopus 로고
    • Digital Matrix Corporation, Hempstead, NY 11550, USA
    • Digital Matrix Corporation, 92 Madison Ave., Hempstead, NY 11550, USA.
    • 92 Madison Ave


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.