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Volumn 37, Issue 2-4, 2008, Pages 50-56
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Developments in micro and nano engineering and manufacturing
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Author keywords
FIB; Micro machining; Nano imprinting; Picrosecond laser ablation
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Indexed keywords
ABLATION;
BUILDING MATERIALS;
FACILITIES;
GLASS CERAMICS;
HEALTH;
INDUSTRIAL ENGINEERING;
ION BOMBARDMENT;
LASER ABLATION;
LITHOGRAPHY;
MACHINING;
METALS;
NONMETALS;
POLYMERS;
PROCESS ENGINEERING;
PRODUCTION ENGINEERING;
PULSED LASER DEPOSITION;
SILICON;
TECHNOLOGY;
TEXTILE INDUSTRY;
CARDIFF;
FIB;
FOCUSED ION BEAM MILLING;
HIGH-PRECISION;
LOW COSTS;
MANUFACTURING ENGINEERING;
MANUFACTURING PROCESSES;
MICRO MACHINING;
MICRO-BRIDGE;
NANO DIMENSIONS;
NANO IMPRINTING;
NANO STRUCTURING;
NANO-ENGINEERING;
NEW PROCESSES;
NON-SILICON MATERIALS;
OPEN ACCESS;
OPTICAL TELECOMMUNICATIONS;
PICOSECOND LASER ABLATION;
PICROSECOND LASER ABLATION;
TEXTILE PROCESSING;
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EID: 48849108733
PISSN: 14658011
EISSN: None
Source Type: Journal
DOI: 10.1179/174328908X283302 Document Type: Conference Paper |
Times cited : (9)
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References (10)
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