Patterned high frequency thick film MEMS transducer

Integrated Ferroelectrics

Volumn 90, Issue 1, 2007, Pages 42-52

  Dauchy, F M ^a   Dorey, R A ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 48449096565     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580601099108     Document Type: Conference Paper

References (11)

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