Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films

Materials Letters

Volumn 62, Issue 26, 2008, Pages 4235-4237

  Wang, X J ^a   Zhang, L D ^a   Zhang, J P ^a   He, G ^a   Liu, M ^a   Zhu, L Q ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (China)

Author keywords

Optical properties; Post deposition annealing; Spectroscopic ellipsometry; Y2O3 films

Indexed keywords

OPTICAL PROPERTIES; SEMICONDUCTING CADMIUM TELLURIDE;

OPTICAL (PET) (OPET); POST DEPOSITION ANNEALING (PDA);

ANNEALING;

EID: 48449096121     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2008.07.003     Document Type: Article

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