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Volumn , Issue , 2007, Pages 828-831

Thermoelectric flow sensors with monolithically integrated channel structures for measurements of very small flow rates

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONVERTERS; FLOW RATE; MONOLITHIC INTEGRATED CIRCUITS;

EID: 48349142653     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388529     Document Type: Conference Paper
Times cited : (9)

References (7)
  • 1
    • 0022327261 scopus 로고
    • High-preoision, high-performanoe mass-flow sensor with integrated laminar flow micro-channels
    • Tech. Digest Transducers'85
    • K. Petersen, J. Brown, "High-preoision, high-performanoe mass-flow sensor with integrated laminar flow micro-channels", Tech. Digest Transducers'85, 1985, p. 361-363.
    • (1985) , pp. 361-363
    • Petersen, K.1    Brown, J.2
  • 2
    • 0029313480 scopus 로고
    • Low-cost silicon sensors for mass flow measurement of liquids and gases
    • N.T. Nguyen, R. Kiehnscherf, "Low-cost silicon sensors for mass flow measurement of liquids and gases", Sensors & Actuators, vol. A49, 1995, p. 17-20.
    • (1995) Sensors & Actuators , vol.A49 , pp. 17-20
    • Nguyen, N.T.1    Kiehnscherf, R.2
  • 5
    • 27544491744 scopus 로고    scopus 로고
    • A High-Temperature thermopile fabrication process for thermal flow sensors
    • Tech. Digest Transducers'05, June 6.-9
    • R. Buchner, K. Rohloff, W. Lang, W. Benecke; "A High-Temperature thermopile fabrication process for thermal flow sensors", Tech. Digest Transducers'05, June 6.-9., 2005, pp. 575-578.
    • (2005) , pp. 575-578
    • Buchner, R.1    Rohloff, K.2    Lang, W.3    Benecke, W.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.