A novel neural recording probe with built-in load sensors

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 1128-1131

  Wen, Chih Chieh ^a   Lee, Yu Tao ^a   Yeh, Shih Rung ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

NONMETALS; OPTICAL DESIGN; SENSORS; SILICON; SILICON WAFERS;

DEAD-SPACE; LOAD SENSORS; NEURAL PROBES; NEURAL RECORDINGS; PIEZO RESISTIVE SENSORS; PIEZO-RESISTORS; PROBE TIPS; SIDE WALLS; SOI WAFERS; TRANSVERSE LOADS;

SPACE PROBES;

EID: 48349110645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388605     Document Type: Conference Paper

References (8)

1. P. Norlin, M. Kindlundh, A. Mouroux, K. Yoshida, and U. G. Hofmann, Journal of Micromechanics and Microengineering, Vol. 12, pp.414-419, 2002.
2. P. Thiebaud, C. Beuret, N. F. de Rooij, and M. Koudelka-Hep, Sensors and Actuators, Vol. 70, pp. 51-56, 2000.
3. P. T. Bhatti and K. D. Wise, Journal of Solid-State Circuits, Vol. 41, No. 12, pp. 2965-2973, 2006.
4. D. P. Papageorgiou, S. E. Shore, C. Bledsoe, Jr., and K. D. Wise, Journal of Microelectromechanical Systems, Vol. 15, No. 4, pp. 1025-1033, 2006.
5. C. Xu, W. Lemon, and C. Liu, Sensors and Actuators, Vol. 96, pp. 78-85, 2002.
6. Y.Y. Chen, T.S. Kuo, and F.S. Jaw, Journal of Neuroscience Methods, vol. 139, p. 99-109, 2004.
7. B.K. Nguyen, K. Hoshino, K. Matsumoto, and I. Shimoyama, Proceedings of the MEMS'06, Istanbul, Turkey, January 2006, pp.662-665.
8. S. M. Sze, "Semiconductor Sensors", A Wiley-interscience Publication, pp.178, 1994.