Etch rate dependence on crystal orientation for lithium niobate

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 2119-2122

  Randles, Andrew B ^a   Tanaka, Shuji ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE PROPAGATION; LITHIUM; NIOBIUM COMPOUNDS; ULTRASONICS;

ETCH RATES; EXPERIMENTAL DATA; LITHIUM NIOBATE;

CRYSTAL ORIENTATION;

EID: 48149092752     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.533     Document Type: Conference Paper

References (11)

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