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Volumn 108, Issue 9, 2008, Pages 821-825

An improved in situ measurement of offset phase shift towards quantitative damping-measurement with AFM

Author keywords

AFM; Dynamic nanoindentation; Mechanical damping

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; DAMPING; DYNAMIC ANALYSIS; DYNAMIC MECHANICAL ANALYSIS; EXTREME ULTRAVIOLET LITHOGRAPHY; MEASUREMENTS; NANOTECHNOLOGY; PHASE SHIFT;

EID: 48149084323     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.01.005     Document Type: Article
Times cited : (6)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.