A lateral-shift-free LVD microlens scanner for confocal microscopy

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Volumn , Issue , 2007, Pages 141-142

  Wu, L ^a   Xie, H ^a  

^a University of Florida   (United States)

Author keywords

Bimorph; Confocal microscopy; Large vertical displacement; Lateral shift free; Tunable microlens

Indexed keywords

COMPOSITE MICROMECHANICS; CONFOCAL MICROSCOPY; FOCUSING; IMAGING TECHNIQUES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; PHOTONICS; RESONANCE; SCANNING;

BIMORPH; FOCAL PLANES; INTERNATIONAL CONFERENCES; LARGE VERTICAL DISPLACEMENT; LATERAL SHIFT FREE; LATERAL SHIFTING; LVD MICROACTUATOR; MICRO LENSING; MICROLENS SCANNER; NANO-PHOTONICS; OPTICAL MEMS; RESONANCE FREQUENCIES; TUNABLE MICROLENS; VERTICAL ACTUATION; VERTICAL MOTIONS;

MICROLENSES;

EID: 48049105725     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2007.4373880     Document Type: Conference Paper

References (4)

1. S. Kwon, V Milanovic, and L.P.Lee, "Large-displacement vertical microlens scanner with low driving voltage," IEEE Photon. Technol. Lett., 14, pp. 1572-1574 (2002).
2. T. Krupenkin, S. Yang, and P. Mach, "Tunable liquid microlens," Appl. Phys. Lett., 82, pp.316-318 (2003).
3. A. Jain, and H. Xie, "A Tunable Microlens Scanner with Large-Vertical-Displacement Actuation," IEEE MEMS'05, Miami Beach, Florida, Jan. 2005, pp. 92-95.
4. A. Jain and H. Xie, "Microendoscopic confocal imaging probe based on an LVD microlens scanner," IEEE J. Sel. Topics Quantum Electron., 13, no.2, pp.228-234 (2007).