Sleeve-type ultra miniature optical fiber pressure sensor fabricated by PRIE

IEEE Sensors Journal

Volumn 8, Issue 7, 2008, Pages 1337-1341

  Shimada, Masato ^a   Kinefuchi, Yoshio ^a   Takahashi, Koro ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

Deep reactive ion etching; Fabry Perot interferometer; Optical fiber; Pressure sensor

Indexed keywords

DETECTORS; DIAPHRAGMS; ELECTRON BEAM LITHOGRAPHY; FABRICATION; FABRY-PEROT INTERFEROMETERS; FIBERS; INTERFEROMETERS; OPTICAL DESIGN; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL MATERIALS; OPTICAL SENSORS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; REACTIVE ION ETCHING; SENSORS;

COST PRESSURES; DEEP REACTIVE ION ETCHING (DRIV); FABRY-PEROT; FIBER PRESSURE SENSOR; FUNDAMENTAL CHARACTERISTICS; LIGHT INTENSITIES; MASS PRODUCTION; OPTICAL (PET) (OPET);

FIBER OPTICS;

ASSEMBLY; DETECTORS; ELECTRON BEAMS; FIBER OPTICS; LITHOGRAPHY; OPTICAL MATERIALS; PRESSURE; SENSORS;

EID: 47849119198     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.926970     Document Type: Conference Paper

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