An efficient approach of handling and deposition of micro and nano entities using sensorized microfluidic end-effector system

Sensors and Actuators, A: Physical

Volumn 147, Issue 1, 2008, Pages 6-16

  Wejinya, Uchechukwu C ^a   Shen, Yantao ^b   Xi, Ning ^c   Chiu Lai, King Wai ^c   Zhang, Jiangbo ^c  

^a University of Arkansas   (United States)

^b Reno   (United States)

^c Michigan State University   (United States)

Author keywords

Carbon nanotubes; Deposition; Droplet control; End effector; Micro electronics; Microfluidic handling; nanoelectronics; PVDF; Sensors

Indexed keywords

AUTOMATION; CHEMOTHERAPY; DIAPHRAGMS; DRAG; DROP FORMATION; DROPS; DRUG DELIVERY; DRUG DOSAGE; END EFFECTORS; FLUID MECHANICS; METALLIZING; NANOCOMPOSITES; NANOFLUIDICS; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; NUCLEIC ACIDS; ORGANIC ACIDS; PUMPS;

DRAG FORCES; END EFFECTORS; IN-SITU; IN-SITU MEASUREMENTS; MICRO ELECTRODES; MICRO FLUIDIC; MICRO-PIPETTE; NANO MANUFACTURING; POLYVINYLIDENE FLUORIDE (PVDFF); SUB MICRONS; SUCTION FORCE; VOLTAGE DRIVERS;

CARBON NANOTUBES;

EID: 47649126313     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.03.021     Document Type: Article

References (22)

1. Zesch W., Brunner M., and Weber A. Vacuum tool for handling microobjects with a nanorobot. Proceedings of the IEEE International Conference on Robotics and Automation (1997) 1761-1766
2. Arai F., Ando D., and Fukuda T. Micro manipulation based on micro physics. IEEE/RSJ Conference on Intelligent Robots and Systems vol. 2 (1995) 236
3. Ron Fearing. Survey of sticking effects for micro parts handling. IEEE/RSJ Conference on Intelligent Robots and Systems vol. 2 (1995) 212-217
4. Greitmann G., and Buser R. Tactile microgripper for automated handling of microparts. 8th Int. Conf. on Solid-State Sensors and Actuators. Stockholm, Sweden (1995)
5. Miyazaki H. Fabrication of three-dimensional micro structures by heaping up fine particles. Proc. of 72nd Annual Spring Meeting (1995) 273-276
6. K.T. Brown, D.G. Flaming, Advanced Micropipette Techniques for Cell Physiology (1992)
7. Masuyaki N., Kazuhisha I., Tomomasa S., and Yotaro H. Prototypes of non-tweezing handling tools with releasing mechanisms. Trans. Japan Soc. Mech. Eng., C 61 583 (1995) 1021-1026
8. Wejinya U.C., Shen Y.T., Xi N., and Winder E. Development of pneumatic end effector for micro robotic manipulators. Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (2005) 558-563
9. Wejinya U.C., Shen Y.T., Xi N., and Zhang J. Microfluidic end effector for manufacturing of nano devices. Proceedings of the IEEE International Conference on Robotics and Automation (2006) 1384-1389
10. Hatch A., Kamholz A.E., Holman G., Yager P., and Böhringer K.F. A ferrofluidic magnetic micropump. J. Microelectromech. Syst. 10 June (2001)
11. Yang L.J., Yao T.J., Huang Y.L., Xu Y., and Tai Y.C. Matching velocity of capillary meniscuses in microchannels. Fifteenth IEEE International Conference on Microelectromechanical Systems (MEMS 02) (2002)
12. Phil Paik V.K., Pamula M.G., Pollack R.B., and Fair. Electrowetting-based droplet mixers for microfluidic systems. Lab Chip 3 (2003) 28-33
13. Ashutosh Shastry M.J., Case K.F., and Böhringer. Directing droplets using microstructured surfaces. Langmuir 22 14 (2006) 6161-6167
14. Stanley Middleman. An Introduction to Fluid Dynamics (1997), John Wiley and Sons, Inc., New York 30-48 (Ch. 2)
15. http://www.udel.edu/pchem/C446/Experiments/exp1.pdf
16. Munson B.R., Young D.F., and Okiishi T.H. Fundamentals of Fluid Mechanics (1997), John Wiley and Sons, Inc., New York 362-370 (Ch. 6)
17. http://www.smallparts.com/
18. http://www.knf.com/pdfs/nmp05.pdf
19. An American National Standard: IEEE Standard on Piezoelectricity, ANS/IEEE Standard 176-1987, 1987.
20. http://www.measurementcomputing.com.
21. Shen Y.T., Xi N., and Li W.J. Force guided assembly of micro mirrors. Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, Vol. 3 (2003) 2149-2154
22. Binning G., Quate C.F., and Gerber C. Atomic force microscope. Phys. Rev. Lett. 56 9 (1986) 930-933