Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Volumn , Issue , 2007, Pages 442-443

  Onishi, Y ^a   Takagi, H ^b   Hirai, Y ^c   Takahashi, M ^b   Maeda, R ^b   Tanabe, T ^c   Iriye, Y ^a  

^a Mizuho Information and Research Inc   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; NANOIMPRINT LITHOGRAPHY;

EXPERIMENTAL ANALYSIS; FINITE ELEMENT MESHING; INTERNATIONAL (CO); LINE AND SPACE PATTERNS; MATE RIAL PROPERTIES; MICRO-PROCESSES; NANO IMPRINTS; NUMERICAL SIMULATIONS; PRACTICAL USE;

NANOTECHNOLOGY;

EID: 47349127269     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2007.4456294     Document Type: Conference Paper

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