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Electronics, Robotics and Automotive Mechanics Conference, CERMA 2007 - Proceedings

Volumn , Issue , 2007, Pages 170-174

Fabrication and characterization of porous silicon on crystalline silicon based devices

(6) Fonthal, F a Trifonov, T b Rodriguez, A b Goyes, C a Vilanova, X c Pallares J c

a UNIVERSIDAD AUTÓNOMA DE OCCIDENTE (Colombia)

b UNIVERSITAT POLITÈCNICA DE CATALUNYA (Spain)

c UNIVERSITAT ROVIRA I VIRGILI (Spain)

Author keywords

Electrochemical etching; Humidity sensor; NH3 sensor; Porous silicon

Indexed keywords

AUTOMATION; AUTOMOBILE ELECTRONIC EQUIPMENT; AUTOMOBILE PARTS AND EQUIPMENT; CRYSTALLINE MATERIALS; CURRENT VOLTAGE CHARACTERISTICS; NONMETALS; OPTICAL DESIGN; POROUS SILICON; SILICON; SPEED;

AUTOMOTIVE MECHANICS; CRYSTALLINE SILICONS; CURRENT VOLTAGE (I V) CHARACTERISTICS; ELECTRICAL CONTACTS; ELECTRICAL MODELING; ELECTRONIC DEVICES; HF ETCHING; POROUS LAYERS; POROUS SILICON (PS); SI DEVICES;

SILICON WAFERS;

EID: 47349127032 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/CERMA.2007.4367680 Document Type: Conference Paper

Times cited : (6)

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