Development of a cosputter-evaporation chamber for Fe-Ga films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 4, 2008, Pages 581-586

  Morley, N A ^a   Yeh, S L ^a   Rigby, S ^a   Javed, A ^a   Gibbs, M R J ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DC-MAGNETRON SPUTTERING; DEPOSITION TECHNIQUES; EVAPORATION CHAMBERS; GA FILMS;

EID: 46449093907     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2924416     Document Type: Article

References (18)

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