Integration of thin-film galfenol with MEMS cantilevers for magnetic actuation

IEEE Transactions on Magnetics

Volumn 42, Issue 10, 2006, Pages 3102-3104

  Basantkumar, Rajneeta R ^a   Hills Stadler, Bethanie J ^a   Robbins, William P ^a   Summers, Eric M ^b  

^a University of Minnesota   (United States)

^b Etrema Products Inc   (United States)

Author keywords

Galfenol; Magnetostriction; MEMS

Indexed keywords

ACTUATORS; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETIC FIELDS; MAGNETOMETERS; MAGNETOSTRICTION; MICROELECTROMECHANICAL DEVICES; X RAY DIFFRACTION ANALYSIS;

CAPACITANCE BRIDGE METHOD; GALFENOL; VIBRATING SAMPLE MAGNETOMETRY (VSM);

THIN FILMS;

EID: 33846624592     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2006.879666     Document Type: Article

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