Deposition temperature effect on dielectric properties of (Ba,Sr)TiO 3 thin films for microwave tunable devices

Integrated Ferroelectrics

Volumn 49, Issue , 2002, Pages 123-132

  Lee, Bong Yeon ^a   Cheon, Chae Il ^a   Yun, Eui Jung ^a   Kim, Jeong Seog ^a  

^a Hoseo University   (South Korea)

Author keywords

BST thin film; Deposition temperature; Dielectric property; RF sputtering; Tunability

Indexed keywords

DEPOSITION; DIELECTRIC PROPERTIES; MICROWAVE DEVICES; SPUTTERING; SUBSTRATES; TUNING;

BST THIN FILM; DEPOSITION TEMPERATURE; TUNABILITY;

THIN FILMS;

EID: 4644349305     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/713718359     Document Type: Article

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