Thin film formation on non-planar surface with use of spray coating fabrication

Microsystem Technologies

Volumn 10, Issue 5, 2004, Pages 360-363

  Ichiki, M ^a   Zhang, L ^a   Yang, Z ^a   Ikehara, T ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEPOSITION; FERROELECTRIC MATERIALS; FILM GROWTH; HEAT TREATMENT; HYDROPHILICITY; HYDROPHOBICITY; MICROELECTROMECHANICAL DEVICES; PEROVSKITE; SOLUTIONS; SPRAYED COATINGS; SURFACE PHENOMENA;

CARRIER GAS; CHEMICAL SOLUTION DEPOSITION (CSD); RESEARCHERS; SPRAY COATING FABRICATION;

THIN FILMS;

EID: 4644281600     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0443-y     Document Type: Conference Paper

References (12)

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