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Volumn 24, Issue 7, 2004, Pages 885-889

New method for determination of the optical constants and thickness of thin film

Author keywords

Dispersion equation; Downhill simplex method; Optical constants of thin film; Thin film optics

Indexed keywords

CURVE FITTING; ELECTROMAGNETIC DISPERSION; GLOBAL OPTIMIZATION; OPTICAL COATINGS; OPTICAL PROPERTIES; SILICON NITRIDE; THICKNESS MEASUREMENT; TITANIUM DIOXIDE;

EID: 4644255792     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (23)

References (13)
  • 1
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • Swanepoel R. Determination of the thickness and optical constants of amorphous silicon. J. Phys. (E), 1983, 16: 1214-1222
    • (1983) J. Phys. (E) , vol.16 , pp. 1214-1222
    • Swanepoel, R.1
  • 2
    • 0021513002 scopus 로고
    • Multiple determination of the optical constants of thin-film coating materials
    • Arndt D P, Azzam R M A, Bennett J M et al.. Multiple determination of the optical constants of thin-film coating materials. Appl. Opt., 1984, 23(20): 3571-3596
    • (1984) Appl. Opt. , vol.23 , Issue.20 , pp. 3571-3596
    • Arndt, D.P.1    Azzam, R.M.A.2    Bennett, J.M.3
  • 3
    • 0034186303 scopus 로고    scopus 로고
    • Determination of the complex dielectric coefficient and thickness of absorbing films using guided waves
    • Chinese source
    • Jiang Yi, Cao Zhuangqi, Shen Qishun et al.. Determination of the complex dielectric coefficient and thickness of absorbing films using guided waves. Acta Optica Sinica, 2000, 20(5): 642-646 (in Chinese)
    • (2000) Acta Optica Sinica , vol.20 , Issue.5 , pp. 642-646
    • Jiang, Y.1    Cao, Z.2    Shen, Q.3
  • 4
    • 0036519699 scopus 로고    scopus 로고
    • Refractive indexes of oxidized thin films deposited by ion beam sputtering
    • Chinese source
    • Gu Peifu, Li Haifeng, Zhang Yueguang et al.. Refractive indexes of oxidized thin films deposited by ion beam sputtering. Acta Optica Sinica, 2002, 22(3): 290-293 (in Chinese)
    • (2002) Acta Optica Sinica , vol.22 , Issue.3 , pp. 290-293
    • Gu, P.1    Li, H.2    Zhang, Y.3
  • 5
    • 2342439569 scopus 로고    scopus 로고
    • Refractive index measured by optical fiber Michelson interferometer
    • Chinese source
    • Li Maohe, Zhang Meidun. Refractive index measured by optical fiber Michelson interferometer. Acta Optica Sinica, 2000, 20(9): 1294 -1296 (in Chinese)
    • (2000) Acta Optica Sinica , vol.20 , Issue.9 , pp. 1294-1296
    • Li, M.1    Zhang, M.2
  • 6
    • 0029424643 scopus 로고
    • Simultaneous determination of thickness and optical constants of thin films
    • Forouhi A R, Bloomer I. Simultaneous determination of thickness and optical constants of thin films. Proc. SPIE, 1995, 2439: 126-136
    • (1995) Proc. SPIE , vol.2439 , pp. 126-136
    • Forouhi, A.R.1    Bloomer, I.2
  • 7
    • 0035335261 scopus 로고    scopus 로고
    • A general-purpose software for optical characterization of thin films: Specific features for microelectronic applications
    • Bosch S, Ferre-Borrull J, Sancho-Parramon J et al.. A general-purpose software for optical characterization of thin films: specific features for microelectronic applications. Solid-State Electronics, 2001, 45(5): 703-709
    • (2001) Solid-State Electronics , vol.45 , Issue.5 , pp. 703-709
    • Bosch, S.1    Ferre-Borrull, J.2    Sancho-Parramon, J.3
  • 8
    • 0004181176 scopus 로고
    • Beijing: China Machine Press, Chinese source
    • Tang Jingfa, Gu Peifu. Thin Film Optics and Technology. Beijing: China Machine Press, 1989. 18-20 (in Chinese)
    • (1989) Thin Film Optics and Technology , pp. 18-20
    • Tang, J.1    Gu, P.2
  • 9
    • 4644330006 scopus 로고
    • Shanghai: Shanghai Science and Technology Press, Chinese source
    • Xi Shaolin, Zhao Fengzhi. The Numerical Method of Optimization. Shanghai: Shanghai Science and Technology Press, 1983. 177-183 (in Chinese)
    • (1983) The Numerical Method of Optimization , pp. 177-183
    • Xi, S.1    Zhao, F.2
  • 10
    • 0003972070 scopus 로고
    • Yang J. (transl.), Beijing: Science Press, Chinese source
    • Born M, Wolf E. Principle of Optics. Yang Jiasun Transl. Beijing: Science Press, 1978. 118-126 (in Chinese)
    • (1978) Principle of Optics , pp. 118-126
    • Born, M.1    Wolf, E.2
  • 11
    • 0041535642 scopus 로고    scopus 로고
    • Hefei: University of Science and Technology of China Press, Chinese source
    • Fang Rongchuan. Solid Spectroscopy. Hefei: University of Science and Technology of China Press, 2001. 10-15 (in Chinese)
    • (2001) Solid Spectroscopy , pp. 10-15
    • Fang, R.1
  • 12
    • 36549099749 scopus 로고
    • 3 films: Basic optical properties and applications to energy-efficient windows
    • 3 films: Basic optical properties and applications to energy-efficient windows. J. Appl. Phys, 1986, 60(11): 123-159
    • (1986) J. Appl. Phys , vol.60 , Issue.11 , pp. 123-159
    • Hamberg, I.1    Granqvist, C.G.2
  • 13
    • 0001524926 scopus 로고    scopus 로고
    • Parameterization of the optical functions of amorphous materials in the interband region
    • Jellison G E. Parameterization of the optical functions of amorphous materials in the interband region. Appl. Phys. Lett., 1996, 69(3): 371-373
    • (1996) Appl. Phys. Lett. , vol.69 , Issue.3 , pp. 371-373
    • Jellison, G.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.