Refractive indexes of oxidized thin films deposited by ion beam sputtering

Guangxue Xuebao/Acta Optica Sinica

Volumn 22, Issue 3, 2002, Pages 290-293

  Gu, Peifu ^a   Li, Haifeng ^a   Zhang, Yueguang ^a   Liu, Xu ^a   Tang, Jinfa ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Ion beam sputtering; Oxidized thin films; Refractive index

Indexed keywords

ION BEAM ASSISTED DEPOSITION; OPTICAL COMMUNICATION; OXIDES; REFRACTIVE INDEX; SPUTTER DEPOSITION;

FABRY PEROT MULTILAYER SYSTEMS; ION BEAM SPUTTERING; OXIDES THIN FILMS;

OPTICAL FILMS;

EID: 0036519699     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. Temperature-stable bandpass filters deposited with plasma ion-assisted deposition
2. Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted deposition
3. Fabrication and characteristics of DWDM filters deposited by IAD
4. Hiprecision optical thickness monitor applied to manufacture of ultra narrow band pass filter