A novel passive membrane pumping nano Fountain-Pen

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 1012-1017

  Lee, Young Kwan ^a   Lee, Suk Han ^a   Kim, Youn Jea ^a   Kim, Hunmo ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Flow control; Nano fountain pen nanolithography

Indexed keywords

CLADDING (COATING); DEFLECTION (STRUCTURES); FLOW CONTROL; FLOW RATE; FOUNTAINS; INJECTION (OIL WELLS); LITHOGRAPHY; MOLECULES; NEMS; UNLOADING;

ACTIVE MEMBRANE PUMPING; CANTILEVER DEFLECTION; CAPILLARY FORCES; DEFLECTION (OVALIZATION); DIP PEN; FLUID INJECTIONS; FOUNTAIN PENS; IN CHANNELS; INTERNATIONAL CONFERENCES; MASS FLOW RATES; MEMBRANE PUMPING; MOLECULAR SYSTEMS; NANO INDENTATION; NANO-LITHOGRAPHY; TIP SURFACES;

MEMBRANES;

EID: 46149125522     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334601     Document Type: Conference Paper

References (10)

1. Young-kwan Lee, Jin-Hyoung Lee, Sung-Kun Lee, Suk-Han Lee, Youn-Jea Kim, Hunmo Kim, "Nano Manufacturing Using Fountain Pen Nanolithography with Active Membrane Pumping", Key Engineering Materials Vols. 326-328 (2006) pp. 425-428
2. G. Binning, C.F. Quate and Ch. Gerber, "Atomic force microscope," Phys. Rev. Lett. Vol. 56 (1986), p. 930
3. B. Bhushan, J.N. Israelachvili and U. Landman, "Nano-tribology: friction, wear and lubrication at atomic scale," Nature Vol. 374 (1995), p. 607
4. R.D. Piner, J. Zhu, F. Xu, S. Hong and C.A. Mirkin, "Dip-pen nanolithography," Science Vol. 283 (1999), p. 661
5. K.H. Kim, C. Ke, N. Moldovan and H.D. Espinosa, "Massively parallel multi-tip nanoscale writer with fluidic capabilities - fountain pen nanolithography (FPN)," Proc. 4th Int. Symp. on MEMS and Nanotechnology (2003), p. 235
6. S. Deladi, J.W. Berenschot, N.R. Tas, G.J.M. Krijnen, J.H. de Boer, M.J. de Boer and M.C. Elwenspoek, "Fabrication of micromachined fountain pen with in situ characterization possibility of nano scale surface modification," J. Micromech. Microeng. Vol. 15 (2005), p. 528
7. E. Colgate and H. Matsumoto, "An Investigation of Electro-Wetting-Based Microactuation," J. Vac. Sci. Technol. Vol. A8 (1990), p. 3625
8. V.D. Sobolev, "Surface Tension and Dynamic Contact Angle of Water in Thin Quartz Capillaries," J. Colloid Interface Sci. Vol. 222 (2004), p. 51
9. J.E. Sader, "Parallel beam approximation for V-shaped atomic force microscope cantilevers," Rev. Sci. Instrum. Vol. 66 (1995), p. 4583
10. S. Timoshenko, S. Woinowsky-Krieger, Theory of Plates and Shells The Second Edition, New York: McGraw-Hill, 1959