Nano manufacturing using fountain pen nano-lithography with active membrane pumping

Key Engineering Materials

Volumn 326-328 I, Issue , 2006, Pages 425-428

  Lee, Young Kwan ^a   Lee, Jin Hyoung ^a   Lee, Sung Kun ^a   Lee, Suk Han ^a   Kim, Youn Jea ^a   Kim, Hunmo ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Active membrane pumping; Fountain pen nano lithography; Nano scale patterning

Indexed keywords

CAPILLARY FLOW; CHANNEL FLOW; LIQUID MEMBRANES; NUMERICAL METHODS; PUMPS;

ACTIVE MEMBRANE PUMPING; FOUNTAIN PEN NANO LITHOGRAPHY (FPN); NANO MANUFACTURING; NANO SCALE PATTERNING;

NANOTECHNOLOGY;

EID: 33751546929     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-415-4.425     Document Type: Conference Paper

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